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Optica Publishing Group
  • Imaging and Applied Optics 2018 (3D, AO, AIO, COSI, DH, IS, LACSEA, LS&C, MATH, pcAOP)
  • OSA Technical Digest (Optica Publishing Group, 2018),
  • paper JM4A.24
  • https://doi.org/10.1364/3D.2018.JM4A.24

Thickness and refractive index analysis of ellipsometry data of ultra-thin semi-transparent films

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Abstract

Ellipsometry measurement of both the refractive index and the thickness of ultra-thin semi-transparent film are a great challenge in optical metrology today. Here we present a new method making this possible.

© 2018 The Author(s)

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