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  • Asia Communications and Photonics Conference (ACPC) 2019
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper M4A.257

Experimental Study of Dependence of Waveguide Array Phase Errors on Waveguide Width

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Abstract

We investigate theoretically and experimentally the dependence of phase errors on the waveguide widths in high index contrast silicon nitride waveguides. Phase errors from the waveguide sidewall roughness can be effectively suppressed using wider waveguides.

© 2019 The Author(s)

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