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Multi-Spectrum Analysis of Growth Temperature Dependent Crystal Structure of MgZnO Thin Films Grown on Sapphire

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Abstract

Mg0.06Zn0.94O films are epitaxially grown at 350 to 650 °C. Depolarization effect was found occurs at ~390 nm, while the thickness non-uniformity increases with growth temperature, ascribed to increased Mg incorporation into hexagonal ZnO phase.

© 2017 Optical Society of America

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