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High Quality Factor Dry-etched Lithium Niobate Ridge Waveguide Micro-ring Resonators

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Abstract

We fabricated and characterized a high quality factor of 16,500 micro-ring resonator on Lithium Niobate thin film with a radius of 80 μm, using standard E-beam lithography and optimized Argon-based dry etch process.

© 2017 Optical Society of America

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